This technology is an advanced single-scan sequential lateral solidification (SLS) tool that uses position controlled laser triggering and multiple laser tubes with delayed triggering for high throughput use and compatibility with excimer-laser annealing (ELA) systems.
Active matrix organic light emitting diode (AMOLED) displays are widely used in handheld electronics including cellphones and tablets. Unlike the lower quality liquid crystal displays (LCD), their ability to switch between pixels is dependent on poly-crystalline silicon based transistor arrays and are, therefore, limited in size by cost and the quality of crystallization over large areas. Conventional crystallization methods for amorphous silicon, including ELA and SLS, are slow and unreliable at producing large-area displays cost-effectively. Additional methods are needed to improve the SLS systems to allow for increased precision and the elimination of variations of the stage position from its intended position.
This technology circumvents any issue with non-uniform crystallization by adapting an SLS system so that one or more lasers are fired in a non-periodic sequence. Using sample alignment techniques, overlapped pulses can be directed to the fabrication sights for pixel circuits. This allows for both high throughput and fine control over the crystallization process. The system can be adapted to or combined with existing ELA and SLS systems.
IR M10-054
Licensing Contact: Greg Maskel